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G. Karbasian,
P. Fay
, Huili G. Xing, A. O. Orlov and G. L. Snider,
"
Chemical mechanical planarization of gold
"
J. Vac. Sci. Tech. A 32, 021402, Jan. 2014
Adhesion
Gold
Nickel
Slurries
Surfactants
Jan. 2014