Publication Library
| Citation | Research Areas | Publication Date |
|---|---|---|
| G. Karbasian, P. Fay, Huili G. Xing, A. O. Orlov and G. L. Snider, "Chemical mechanical planarization of gold" J. Vac. Sci. Tech. A 32, 021402, Jan. 2014 | Jan. 2014 |
| Citation | Research Areas | Publication Date |
|---|---|---|
| G. Karbasian, P. Fay, Huili G. Xing, A. O. Orlov and G. L. Snider, "Chemical mechanical planarization of gold" J. Vac. Sci. Tech. A 32, 021402, Jan. 2014 | Jan. 2014 |