Publication Library
Filters
Electron beams
| Citation | Research Areas | Publication Date |
|---|---|---|
| G. Karbasian, P. Fay, H. G. Xing, D. Jena, A. Orlov, and G. Snider, "High aspect ratio features in PMGI using electron beam lithography and solvent developers" Journal Vacuum Science Technology B, 30, 06FI01, Aug. 2012 | Aug. 2012 |