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III-V semiconductors Oxide surfaces Surface morphology III-V semiconductors Ultraviolet light
Citation | Research Areas | Publication Date |
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Y. Yue, X. Yan, W. Li, H. G. Xing, D. Jena, and P. Fay, "Faceted sidewall etching of n-GaN on sapphire by photoelectrochemical wet processing" J. Vac. Sci. Tech. B, 32, 061201, Sep. 2014 | Sep. 2014 |